Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Volume 76, Issue 1
Displaying 1-10 of 10 articles from this issue
Special Feature / Recent Trends in Atmospheric Pressure Plasma Surface Treatment Technology
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Research Paper
  • Ippei TANAKA, Tatsuya FUKAZAWA, Yasunori HARADA
    2025Volume 76Issue 1 Pages 41-46
    Published: January 01, 2025
    Released on J-STAGE: January 06, 2025
    JOURNAL FREE ACCESS

    For this study, we synthesized diamond using the hot tube chemical vapor deposition (CVD) method, for which the filament of thermal filament CVD is replaced by cylindrical metal foil. Effects of the tube length, total gas flow rate, and distance between the gas outlet and the substrate were investigated when using this method. Diamond and nanocrystalline diamond (NCD) films were obtained with tube lengths greater than 10 mm. Additionally, longer tube lengths were associated with increased deposition rates and decreased film quality, suggesting enhanced gas decomposition. The deposition rate increased along with the total flow rate. At 1500 ℃ tube temperature, the maximum deposition rate of 6 μm/h was achieved under conditions of 3 mm substrate distance and 20 mm tube length. The intensity ratio of the diamond peak to the non-diamond peak, calculated from the Raman spectrum, reached a maximum value of 3.2 for 10 mm tube length and 10 mm substrate distance.

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