Deposition of Diamond Films Using Magneto-Active Plasma CVD and Microwave Plasma CVD

Journal of The Surface Finishing Society of Japan

Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869

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Keywords: Diamond Film, CVD, ECR

JOURNAL FREE ACCESS

1991 Volume 42 Issue 12 Pages 1189-1195

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