Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Damage-free polishing of SiC by Slurryless Electrochemical Mechanical Polishing
Kazuya YAMAMURA
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Keywords: Electrochemical Mechanical Polishing, Silicon Carbide, Slurryless, Anodic Oxidation, Fixed Abrasive, Damage-free
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2022 Volume 73 Issue 11 Pages 523-527

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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