Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Prospects of Electroforming for Precise Microfabrication Technology
Tadashi HATTORI
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Keywords: Electroforming, Precise Microfabrication, MEMS, LIGA Process, Micro Metal Mold
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2011 Volume 62 Issue 12 Pages 619-

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Journal of the Metal Finishing Society of Japan

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Jitsumu Hyomen Gijutsu

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