Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Research Papers
The Deposition Condition of Diamond on a Fine Wire by Hot Filament CVD
Masahide HONDAAkira YAMAMOTOTakahiro TSUTSUMOTO
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2010 Volume 61 Issue 6 Pages 441

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Abstract
Diamond synthesis on fine metal wire was performed effectively using hot filament chemical vapor deposition (CVD). Diamond deposition is difficult when using wire as a substrate because the substrate overheats easily. Touching the substrate directly with a cooling board is effective in such cases, but that technique is inapplicable in cases having only one wire. Another technique is to keep the substrate away from the heat source filament, thereby maintaining an ideal substrate temperature. However, the greater the distance between the filament and substrate, the lower the deposition rate would be. This study investigated a mode of indirect cooling for diamond deposition that does not lower the deposition rate. Results show that diamond on the wire substrate was deposited at a suitable temperature (900-1000 °C) by indirect cooling without keeping the filament away. The filament was hot enough that atomic hydrogen was generated. A diamond deposition rate of approximately 10 μm/h was attained.
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© 2010 by The Surface Finishing Society of Japan
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