MEMSs as Tools for Nanotechnology

Journal of The Surface Finishing Society of Japan

Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869

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MEMSs as Tools for Nanotechnology

Takahito ONO

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Keywords: Microelectromechanical Systems, Nanotechnology, Scanning Probe, Mass Sensor, Carbon Nanotubes

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2005 Volume 56 Issue 12 Pages 819

DOI https://doi.org/10.4139/sfj.56.819

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© 2005 by The Surface Finishing Society of Japan

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