Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Wet Etching of Synthetic Quartz Substrate for Photomask Application
Hiroshi MOHRI
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Keywords: Photomask, Phase Shift Mask, Quartz, Single Trench, Undercut
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2004 Volume 55 Issue 8 Pages 535

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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