Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Development of Nano/Micro-die and Mechanical Parts by Electroforming (II) Evaluation of Fatigue Strength of Microspring Fabricated by High Aspect Lithography with Ultraviolet Rays and Ni-Electroforming
Yasunori SAOTOME
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Keywords: UV-LIGA, Micro Spring, IC-Probe, Fatigue, Linear Motor, Microfactory
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2004 Volume 55 Issue 4 Pages 254-260

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© 2004 by The Surface Finishing Society of Japan
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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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