The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Review
Wide Scan Angle and High Speed MEMS Scanning Devices for Laser Displays Application
Jae-Hyuk PARK, Jun AKEDO
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Keywords: MEMS driving method, Lamb-wave-resonance piezoelectric driving method have been developed for
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2011 Volume 39 Issue 6 Pages 402-406

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Abstract
Metal-based optical MEMS (micro electro mechanical system) scanning devices using an AIST-original
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© 2011 by The Laser Society of Japan
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