The 75th JSAP Autumn Meeting 2014
Session ID : 17p-A19-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
Low-Temperature Crystallization of Amorphous SiXGe1-X Film by Soft X-Ray Irradiation
*Matsuo Naoto, Heya Akira, Itoh Kazuhiro, Takahashi Makoto, Kanda Kazuhiro, Mochizuki Takayasu, Miyamoto Shuji
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