Journal of the Japan Society of Applied Electromagnetics and Mechanics
Online ISSN : 2187-9257
Print ISSN : 0919-4452
ISSN-L : 0919-4452
[Academic Papers]
Experimental Evaluation of Short-Stroke Six-Degree-of-Freedom Actuator
Tomoaki MOTOTSUJIAkira HEYAKatsuhiro HIRATA
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2021 Volume 29 Issue 2 Pages 321-326

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Abstract

 Recently, six-degree-of-freedom mechanisms are demanded in various applications such as positioning systems for semiconductor exposure equipment and camera stabilizer for a drone. The conventional systems are required some actuators and links to drive six-axis. Therefore, the size and weight increase. In order to solve these problems, we proposed the short-stroke six-degree-of-freedom actuator. The proposed magnetic structure and operating principle were verified by a magnetic field analysis using a three-dimensional finite element method. This paper describes the static thrust and torque characteristics that are experimentally clarified by using a prototype. The experimental results show that the proposed actuator can drive to six-axis and that the analysis results are valid by the comparison of the analysis results.

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