Journal of the Japan Society of Powder and Powder Metallurgy
Online ISSN : 1880-9014
Print ISSN : 0532-8799
ISSN-L : 0532-8799
Piezoresistance Properties of α Silicon Carbide Ceramics Doped with Nitrogen
Akira KishimotoYoshimitsu Numata
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JOURNAL OPEN ACCESS

2004 Volume 51 Issue 5 Pages 346-349

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Abstract
α-silicon carbide ceramics with different nitrogen content were fabricated by changing the post-HIP nitrogen gas pressure. Resultant silicon carbide ceramics were all n-type semiconductors in which doped nitrogen played a role of donor. With the doping pressure up to 150MPa, incorporated nitrogen were dissolved into silicon carbide. Lattice parameter, carrier concentration and piezoresistance coefficient changed in accordance with the solution content. Over 150MPa, nitrogen incorporation continued to increase while nitrogen solution was saturated.
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