Abstract
Rutile films were prepared on sapphire (1102) substrates by chemical vapor deposition using titanium tetraisopropoxide {Ti[OCH(CH3)2]4} as a precursor. The Elms showed preferred orientation of (101) parallel to the substrate plane. The epitaxial relationship between the film and the substrate was found by X-ray pole figure analysis. Refractive index nealy equal to that of the single crystal of rutile was measrued for the epitaxial film prepared at 800°C.
