Abstract
We have fabricated quasiparticle tunnel junctions using superconducting single crystal thin film YBa2Cu3O7-x prepared by activated reactive evaporation method. From the tunnel measurement perpendicular to the Cu-O planes at 4.4K gap parameter Δ=11.5±1.5meV and 2Δ/kTc=3.2±0.4 were obtained.