In this study, we report that the deposition rate of films is indicated to be strongly related to the preheating conditions of source powder mixture of ZrO2 and NiO. A stable luminescence was observed clearly during film fabrication. In an aerosol gas deposition method, the source powder is charged during transport by the mutual friction of particles and their collision against the inner surfaces of the tubing and nozzle. The charged powder contributes to the deposition rate of film synthesis and the generation of static electricity depends on the surface condition of the source powder. In particular, the amounts of gas and moisture adsorbed on the particle surface might be key factors.