JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN
Online ISSN : 1349-838X
Print ISSN : 0019-2341
ISSN-L : 0019-2341
Preparation of AlN Thin Films by Reactive Ion Beam Sputtering and The Optical Properties
Ryuji Tsuchiya, Takahiro Hosoda, Yasuo Nakagawa, Fumio Ohtani, Tamaki Yaji
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1996 Volume 80 Issue Appendix Pages 273

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