低温工学
Online ISSN : 1880-0408
Print ISSN : 0389-2441
ISSN-L : 0389-2441
マグネトロンスパッタリングによるYBaCuO超電導テープの作製
福富 勝夫阿久津 仲男田中 吉秋浅野 稔久前田 弘
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1989 年 24 巻 2 号 p. 98-103

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The feasibility of preparing YBaCuO films on metallic substrates was discussed in an attempt to fabricate a superconducting tape. Deposition method employed was an rf magnetron sputtering. MgO buffer layers were found to be a favorable choice to prevent the adverse reaction between the superconducting film and the underlying substrate. Particular attention was given to the preferential resputtering effect due to the bombardment of negative ions during sputtering. The substrate-cathode configuration used to achieve stoichiometric film composition was described. Highly oriented YBaCuO films have been obtained on a Hastelloy-X tape with a MgO buffer layer. The highest zero resistance temperature obtained so far of the YBaCuO thin films on a metallic tape was 80.4K in its as grown state, and a critical current density was 200A/cm2 at 77.4K and 104A/cm2 at 60K. Preliminary results of YBaCuO films deposited on a bundle of Chromel fine wires were also reported.
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