TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan)
Online ISSN : 1880-0408
Print ISSN : 0389-2441
ISSN-L : 0389-2441
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SIM and TEM Micro-structure Observation of Defective Areas Determined by MO Imaging of YBCO-coated Conductors
Hirokazu SASAKI, Takeharu KATO, Yukichi SASAKI, Tsukasa HIRAYAMA, Junko MATSUDA, Teruo IZUMI, Yuh SHIOHARA, Naoji KASHIMA, Shigeo NAGAYA
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Keywords: TEM, SIM, FIB, magneto-optical image, coated conductor
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2004 Volume 39 Issue 11 Pages 541-546

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Abstract
We have developed a defect analysis procedure that combines a magneto-optical (MO) imaging system with scanning ion microscopy (SIM) and transmission electron microscopy (TEM). Low Ic areas of coated conductors were inspected using the MO imaging system. The defective area revealed in the MO image was prepared for cross-sectional SIM specimen using a focused Ga ion beam. The porous YBCO layers were found by SIM observation. Furthermore, defective areas were picked up using micro-sampling and then thinned using a focused Ga ion beam. TEM observation and energy dispersive X-ray spectroscopy indicated that the YBCO layers were composed of Y-rich phases and Ba-Cu-O.
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© 2004 by Cryogenics and Superconductivity Society of Japan (Cryogenic Association of Japan)
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