IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Optical Microscanner Using a Pair of Thermal Microactuators with Alternating Drive
Syutaro SaitoHideo Muro
Author information
JOURNAL FREE ACCESS

2014 Volume 134 Issue 4 Pages 79-84

Details
Abstract
Prototypes of optical microscanners using a pair of thermal microactuators have been designed, fabricated and evaluated. A micromirror with an area of 200×200µm is suspended by a pair of serpentine beams which are connected to a pair of thermal microactuators. The tilted angle of the mirror was simulated using FEM simulator Intelli Suite to optimize the beam parameters. The measured scan angle was about ±1.8°, which agreed reasonably well with the simulated results.
Content from these authors
© 2014 by the Institute of Electrical Engineers of Japan
Previous article Next article
feedback
Top