IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Letter
Feasibility Study for Designing a Parylene Actuator for Nano-positioning
Junji SoneLaurent JalabertHiroyuki Fujita
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2013 Volume 133 Issue 4 Pages 124-125

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Abstract
We considered a polymer-based piezoelectric stack actuator that is based on MEMS nano-positioning technology. We studied the structure of the actuator and important parameters of the actuation design. We used FEM to simulate the electric field, deformation and resonance frequency. On the basis of this simulation, we established the appropriate parameters for the actuator.
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© 2013 by the Institute of Electrical Engineers of Japan
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