IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Letter
Miniaturized Methanol Concentration Sensor Developed using a Quartz Resonator Connected in Series to an Interdigital Capacitor
Shunpei IshiiKeito EmuraTakashi Abe
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2013 Volume 133 Issue 3 Pages 96-97

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Abstract
This paper reports the development of a monolithic methanol concentration sensor for fuel cell applications. An interdigital capacitor and a resonator are fabricated on a single crystal quartz substrate. Methanol solution is introduced into a microchannel on the capacitor. The methanol concentration can be measured by measuring the frequency shift of the resonator because the shift shows a monotonic increase with a change in the relative permittivity of the capacitor connected in series to the resonator. The sensitivity is 0.1 wt %/Hz. We also found that the smallest resonator diameter that achieves a resolution of 0.1 wt % is 1.5 mm. Because the structure and manufacturing process are simple, we expect the proposed sensor to be useful for various kinds of liquid sensing applications.
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© 2013 by the Institute of Electrical Engineers of Japan
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