Power-Regulated Thermal Actuator Based on UV-Patterned Polyimides for a Ciliary Motion System

Julien Malapert; Satoshi Morishita; Manabu Ataka; Hiroyuki Fujita; Dominique Collard; Yoshio Mita

doi:10.1541/ieejsmas.133.77

Special Issue Paper

Power-Regulated Thermal Actuator Based on UV-Patterned Polyimides for a Ciliary Motion System

Julien Malapert, Satoshi Morishita, Manabu Ataka, Hiroyuki Fujita, Dominique Collard, Yoshio Mita

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Keywords: UV-patterned polyimide, thermal actuator, power regulation, micro-conveyor, integrated CMOS circuit

JOURNAL FREE ACCESS

2013 Volume 133 Issue 3 Pages 77-84

DOI https://doi.org/10.1541/ieejsmas.133.77

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Abstract

We have been conducting autonomous distributed MEMS research since the early 1990s. We are now working on an international project involving a new concept based on a self-movable and self-reconfigurable micro-conveyor utilizing ciliary-type micro-actuators arranged in an array over a large surface. The fabrication of the ciliary motion system (CMS) has been successfully simplified using photosensitive polyimides patterned by a direct UV lithography technique. The characteristics of the new device are equivalent to those of the previous devices made by classical methods, including plasma ashing. We also propose an integrated CMOS circuit to accurately regulate the input power of the thermal actuators while preventing overheating.

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