IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Letter
Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles
Yonggang JiangMasayoshi EsashiTakahito Ono
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2011 Volume 131 Issue 7 Pages 270-271

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Abstract
A modeling method for piezoresitive nanocantilevers using their geometrical parameters is described. The spring constant and the effective mass of piezoresistive nanocantilevers are formulated using theoretical and approximation equations, which shows a good agreement with the results of finite element analysis. The displacement sensitivity and minmum detectable force of piezoresistive nanocantilevers with non-uniform doping profiles are calculated by introducing a piezoresistive efficiency factor.
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© 2011 by the Institute of Electrical Engineers of Japan
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