This paper presents a rolling friction model-based friction compensation for precise tracking control of linear motor-driven table systems. Rolling friction in mechanisms behaves as a nonlinear elastic element in the micro-displacement region, and deteriorates the tracking performance with slow settling response in positioning. In this paper, therefore, the rolling friction characteristic is mathematically formulated and is adopted to analytical examinations and compensator design to improve the slow settling response. The proposed compensation has been verified by experiments by using a prototype for industrial positioning devices.