IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Paper
Photoacoustic Signals of Depletion Layer Spread beneath Metal Electrode in Metal/Semiconductor Structure
Masahiko MurakamiNobuya TakabatakeKazunori SatoToshihiko Arai
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2013 Volume 133 Issue 3 Pages 127-131

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Abstract
The photoacoustic signal from the depletion layer beneath the metal electrode in a metal/semiconductor (M/S) structure was detected using the photoacoustic method. To measure the reverse-bias voltage dependence of distribution of the photoacoustic signal from the depletion layer, the surface of the electrode was illuminated and scanned by an intensity-modulated optical-beam. It was obtained that the photoacoustic signal phase differences between depletion layer generating and non-depletion layer were dependent on the depletion layer spreading. One dimensional scanning on the electrode has also revealed that spreading of a depletion layer extends from the each edges of an electrode.
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© 2013 by the Institute of Electrical Engineers of Japan
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