IEEJ Transactions on Electronics, Information and Systems
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
Influence of Gas Mixture Ratio on Laser Output Energy of Discharge-Pumped KrF Excimer Laser
A Discussion on the Basis of Light Intensity Waveforms
Nobuyuki NakagawaHitoshi KawakamiKen Yukimura
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1993 Volume 113 Issue 2 Pages 98-104

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Abstract
Effects of discharge instability and gas kinetics on the laser output energy of a transversely pumped KrF laser are discussed. Time evolution of laser power at 248nm, Kr2F* emission intensity at about 420nm, light intensity over 580 nm representing an existence of glow and arc discharges are experimentally obtained, where fractional densities of krypton and fluorine are varied from 1 to 8% and from 0.1 to 0.7%, respectively. Krypton gas dependency of laser output energy can be explained by the gas kinetics which is based on the behaviours of excited krypton Kr* and trimer excimer Kr2F* When the fractional krypton density GKr is increased from 1 to 4%, the laser output energy increases owing to the increase of Kr* density. For over 4% of GKr, Kr2F* density produced by three-body quenching reaction of KrF* excimer becomes larger. As a result, the laser output energy decreases. For more than 0.4% of fractional fluorine density GF2, it is seen that light intensity transmitted over 580nm becomes strong remarkably in the first half cycle of the current. This remarkable change of the light intensity shows an occurrence of the discharge instability bringing termination of the lasing. Accordingly, when GF2 is varied, the discharge instability is clarified to be a main factor of affecting the laser output energy.
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