This paper proposes a measurement technique for an integrated complex filter. The proposed method is based on two measurement methods with integrated circuitry for calibration. It is accomplished by applying square waves to an FUT (Filter Under Test) instead of sinusoidal waves or by superposing transfer characteristics obtained by applying a single sinusoidal wave to an FUT. In both of the above methods, the output signal connected to the external measurement equipment via a 50Ω coaxial cable and so on. In this case, the output signal of the FUT should be amplified by internal or external amplifiers, which degrades the response. However, it is cancelled out by the proposed calibration circuitry with some analog switches. In addition to the above, for the RC polyphase filter, the source resistance and the load capacitance degrade the measurement results and their effect is discussed. The validity of the proposal is confirmed through computer simulation for a third-order RCPF whose passband is 8-40MHz fabricated by Phenitec 0.6 μm CMOS process. It is shown that the measurement error is -1.10 dB for the square-wave method and -1.00 dB and -0.43 degrees for the superposition method at 40MHz.