Halogen is expected to be a good tracer of water in the mantle. In order to determine the trace amount of halogen in the mantle-derived rocks, noble gas method can be an useful method. In this method, samples are irradiated with neutron in a nuclear reactor and then some elements generate corresponding noble gas isotopes. They are simultaneously determined by noble gas analysis.We had developed noble gas analysis system which can be applied to halogen analysis. For more precise analysis and detection of smaller amount of halogen, we developed new analysis system and evaluate it.