Journal of Architecture, Planning and Environmental Engineering (Transactions of AIJ)
Online ISSN : 2433-0043
Print ISSN : 0910-8017
ISSN-L : 0910-8017
EFFECT OF VOLTAGE DISTRIBUTION ON DIELECTRIC SURFACES ON PERFORMANCE OF CHARGE-REMOVAL METHODS IN CLEANROOM ENVIRONMENTS
Norikazu NAMIKIShuji FUJIIYukinori SHIBUYA
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JOURNAL FREE ACCESS

1993 Volume 446 Pages 1-7

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Abstract
In this study, the measurement of two-dimensional voltage distribution on tribocharged dielectric polymers was conducted with a high-resolution electrostatic voltmeter in cleanroom environments. The distribution was very nonuniform. This measurement technique was applied to evaluate the performance of .charge-removal methods for the dielectrics. The ionizer had difficulty in neutralizing surface charges distributed in the form of mosaics of mixed negative and positive charges. On the other hand, IPA-dipping had drastic charge-removal effects not only to reduce their mean voltage but also to render their voltage distribution uniform.
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© 1993 Architectural Institute of Japan
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